{
  "default_interaction": [
    "ion_source_exponent",
    "ion_rate"
  ],
  "default_interior_case": "0bd95a54b05f1d84",
  "equipment_mapping": {
    "chain": [
      "equipment controls",
      "plasma and surface state not modeled here",
      "effective ViennaPS controls",
      "simulated profile",
      "geometry measurements"
    ],
    "relationship": "many-to-many and uncalibrated"
  },
  "factors": {
    "deposition_thickness": {
      "calibration_note": "Passivation time and gas delivery influence this value, but film added per cycle must be fitted from measured profiles.",
      "calibration_status": "Fit from data",
      "direction": "Higher means more passivation is added per cycle.",
      "equipment_influences": [
        "passivation-step duration",
        "passivation-gas delivery"
      ],
      "kind": "model control",
      "label": "Passivation added per cycle",
      "meaning": "Changes the protective layer added before the next etch phase."
    },
    "etch_time": {
      "calibration_note": "Etch-step time is a direct equipment analogue. The simulated time scale still needs a measured etch-rate match.",
      "calibration_status": "Recipe-linked",
      "direction": "Higher means a longer simulated etch phase.",
      "equipment_influences": [
        "etch-step duration",
        "reactive-gas delivery"
      ],
      "kind": "model control",
      "label": "Etch phase time per cycle",
      "meaning": "Changes the etch dose applied during every cycle."
    },
    "ion_rate": {
      "calibration_note": "Fit this effective rate from depth and profile response across bias and plasma splits.",
      "calibration_status": "Fit from data",
      "direction": "More negative means stronger directional removal.",
      "equipment_influences": [
        "platen bias",
        "ion energy",
        "plasma state"
      ],
      "kind": "model coefficient",
      "label": "Directional removal strength",
      "meaning": "Scales removal driven by simulated ions."
    },
    "ion_source_exponent": {
      "calibration_note": "Fit the angular distribution from profile response or plasma diagnostics. It is not a pressure or bias value.",
      "calibration_status": "Fit from data",
      "direction": "Higher means a narrower arrival-angle distribution.",
      "equipment_influences": [
        "pressure",
        "source and bias conditions",
        "reactor geometry"
      ],
      "kind": "model coefficient",
      "label": "Ion arrival directionality",
      "meaning": "Higher values concentrate simulated ion arrival toward the surface normal."
    },
    "neutral_rate": {
      "calibration_note": "Fit this effective rate from measured etch depth and wall motion across recipe splits.",
      "calibration_status": "Fit from data",
      "direction": "More negative means stronger neutral removal.",
      "equipment_influences": [
        "etch chemistry",
        "reactive-species flux"
      ],
      "kind": "model coefficient",
      "label": "Neutral removal strength",
      "meaning": "Scales removal driven by simulated neutral particles."
    },
    "neutral_sticking_probability": {
      "calibration_note": "Infer this effective probability from profile response. It is not one machine setting.",
      "calibration_status": "Fit from data",
      "direction": "Higher means more reactions on first contact and fewer reflections.",
      "equipment_influences": [
        "chemistry",
        "pressure",
        "temperature",
        "surface condition"
      ],
      "kind": "model coefficient",
      "label": "Neutral surface-reaction probability",
      "meaning": "Changes whether a neutral particle reacts or reflects."
    }
  },
  "focused_cases": [
    {
      "case_id": "3367ceca63385f61",
      "checkpoint_sha256": "6e4ef34348278bcbfbc54ebf3975a64b8bcab42ed312a9816d0ebb3118d1fb0c",
      "citation": {
        "line_number": 1,
        "path": "evidence/numerical/v3_bosch_focused_ion_map_rows.jsonl",
        "sha256": "d92174db65fcdf14b5ba102d6d2a176354f085a714bb83ebced385f530bb4d46"
      },
      "elapsed_s": 907.4490730762482,
      "materials": [
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    "interpretation": "Nine saved factor combinations form a local map. The center has three independent runs; the browser shows every raw run.",
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        }
      ],
      "metrics": {
        "bow": 0.006947946522617848,
        "cd_bottom": 0.2018903634835586,
        "cd_middle": 0.23841871748498125,
        "cd_top": 0.2960307359627531,
        "depth": 1.1863075630815203,
        "floor_center_relief": null,
        "floor_flatness_pv": null,
        "floor_resolution_status": "unavailable",
        "hard_gate_pass": false,
        "maximum_bow_actual_radius": 0.1530805070544105,
        "maximum_bow_fraction": 0.13,
        "maximum_bow_reference_radius": 0.14613256053179266,
        "maximum_cd_error": 0.09810963651644139,
        "maximum_cd_error_cd": 0.2018903634835586,
        "maximum_cd_error_fraction": 0.8499999999999999,
        "measurement_method": "full_width_two_wall_remeasurement",
        "numerically_qualified": false,
        "profile_floor_rmse": null,
        "profile_max_deviation": null,
        "profile_measurement_status": "partial",
        "profile_shape_rmse": null,
        "profile_symmetry_rms": null,
        "profile_wall_rmse": 0.03033447051493678,
        "scallop_rms": 0.0019169880688944382,
        "selected_cycle": 12,
        "sidewall_angle_deg": 3.0283446971169976,
        "trajectory_class": "depth_selected"
      },
      "normalized_coordinates": {
        "deposition_thickness": 0.5,
        "etch_time": 0.5,
        "ion_rate": 0.5,
        "ion_source_exponent": -0.5,
        "neutral_rate": 0.5,
        "neutral_sticking_probability": 0.5
      },
      "rays_per_point": 500,
      "recipe": {
        "deposition_sticking_probability": 0.01,
        "deposition_thickness": 0.01414214,
        "etch_time": 1.0,
        "initial_etch_time": 0.3,
        "ion_rate": -0.06324555,
        "ion_source_exponent": 141,
        "mask_ion_rate": 0.0,
        "mask_taper": 2.0,
        "neutral_rate": -0.04898979,
        "neutral_sticking_probability": 0.15491933,
        "theta_r_min": 45.0
      }
    }
  ],
  "interior_study": {
    "case_count": 18,
    "coordinate_levels": [
      -0.5,
      0.0,
      0.5
    ],
    "descriptive_main_effects": {
      "bow": {
        "available_cases": 18,
        "ranking": [
          {
            "coefficient": 0.016795866482211548,
            "factor": "etch_time"
          },
          {
            "coefficient": -0.01061010692259479,
            "factor": "neutral_rate"
          },
          {
            "coefficient": -0.007955608686221041,
            "factor": "ion_rate"
          },
          {
            "coefficient": -0.006277297016285333,
            "factor": "deposition_thickness"
          },
          {
            "coefficient": -0.006105587477885573,
            "factor": "neutral_sticking_probability"
          },
          {
            "coefficient": -0.0032271085923746804,
            "factor": "ion_source_exponent"
          }
        ]
      },
      "depth": {
        "available_cases": 18,
        "ranking": [
          {
            "coefficient": -0.08929604255802091,
            "factor": "ion_rate"
          },
          {
            "coefficient": -0.07225452584059032,
            "factor": "neutral_sticking_probability"
          },
          {
            "coefficient": 0.07024250384804166,
            "factor": "etch_time"
          },
          {
            "coefficient": -0.058377878166967705,
            "factor": "neutral_rate"
          },
          {
            "coefficient": 0.0381700836996556,
            "factor": "ion_source_exponent"
          },
          {
            "coefficient": -0.007324321091790936,
            "factor": "deposition_thickness"
          }
        ]
      },
      "floor_flatness_pv": {
        "available_cases": 10,
        "ranking": [
          {
            "coefficient": 0.05149935709144583,
            "factor": "etch_time"
          },
          {
            "coefficient": 0.03858093015120947,
            "factor": "neutral_rate"
          },
          {
            "coefficient": 0.03539561637213183,
            "factor": "neutral_sticking_probability"
          },
          {
            "coefficient": -0.031824747584815904,
            "factor": "ion_rate"
          },
          {
            "coefficient": -0.016456845325219745,
            "factor": "ion_source_exponent"
          },
          {
            "coefficient": -0.00552568369541965,
            "factor": "deposition_thickness"
          }
        ]
      },
      "maximum_cd_error": {
        "available_cases": 18,
        "ranking": [
          {
            "coefficient": 0.04663638994630751,
            "factor": "deposition_thickness"
          },
          {
            "coefficient": -0.02456988290083764,
            "factor": "neutral_rate"
          },
          {
            "coefficient": 0.008378702873626121,
            "factor": "ion_rate"
          },
          {
            "coefficient": -0.007904877407774522,
            "factor": "ion_source_exponent"
          },
          {
            "coefficient": -0.001544563777047169,
            "factor": "neutral_sticking_probability"
          },
          {
            "coefficient": 0.000473891721212669,
            "factor": "etch_time"
          }
        ]
      }
    },
    "factor_order": [
      "etch_time",
      "deposition_thickness",
      "ion_source_exponent",
      "ion_rate",
      "neutral_rate",
      "neutral_sticking_probability"
    ],
    "interpretation": "Each profile is one saved six-control combination. The browser does not interpolate or rerun ViennaPS.",
    "method": "18-case D-optimal interior refinement"
  },
  "measurement_example_case_id": "7405eb159356c564",
  "measurement_implementation": {
    "path": "profile_shape_metrics.py",
    "sha256": "bc0adc090be77b64dbbcae1e64588417320cc670736527122d5d7e192d9d4e4d",
    "symbol": "measure_target_via_profile_2d"
  },
  "review": {
    "decision": "All 28 saved profiles were remeasured from both walls. Counts use assumed study bands; no factor effect or interaction is qualified.",
    "derivation": "Count /interactions/*/metrics/hard_gate_pass; each interaction carries its source-row citation.",
    "hard_gate_passes": 5,
    "valid_cases": 28
  },
  "schema_version": 4,
  "scope": "Exact 500-ray discovery cases, remeasured from both saved via walls. They compare factor pairs against assumed study bands; they do not estimate interaction uncertainty, define a machine recipe, or confirm a process window.",
  "targets": {
    "basis": {
      "classification": "assumed_study_target",
      "physical_qualification": false,
      "source": {
        "path": "program.md",
        "section": "Assumed study comparison bands",
        "sha256": "8ceb26df4df5ab1e8d5c150393f0727777be071b0adeff6496528342701a6fe3"
      }
    },
    "depth": 1.25,
    "depth_tolerance": 0.1,
    "maximum_bow": 0.03,
    "maximum_cd_error": 0.06,
    "target_cd": 0.3
  },
  "title": "Dry-etch multi-factor study",
  "traveler_etch_case_id": "7405eb159356c564"
}