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reproducer.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "failed", "previous_event_hash": "250dd6a3be60d7447633a634a2929751e4b91e47428f7e377897112130bf71b4", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "failed_deterministic", "stop_reason": null, "timestamp": "2026-07-18T07:50:56.484715Z", "unresolved_reasons": [ "deterministic execution or geometry failure", "Traceback (most recent call last):\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 246, in run_case\n tp.bosch_etch(\n ~~~~~~~~~~~~~^\n geometry,\n ^^^^^^^^^\n ...<16 lines>...\n on_cycle=capture_final,\n ^^^^^^^^^^^^^^^^^^^^^^^\n )\n ^\n File \"/Users/koohaoming/ViennaPS-HBM/tsv_process.py\", line 374, in bosch_etch\n raise RuntimeError(f\"etch barely moved: depth={depth}\")\nRuntimeError: etch barely moved: depth=-0.06317689032816792\n" ] }, { "attempt": 1, "case_key": "b7dfbfd920d001d9", "case_payload_hash": "e918dbac75819cfb7db35e23b321b64083019e1d25c1ff5ec2310a10a7a48e2e", "checkpoint": { "final_completed_cycle": 16, "path": "autoresearch-results/range_pilot/pattern_bosch_dsd25_rows_checkpoints/b7dfbfd920d001d9_cycle016.npz", "sha256": "d5694491b792227fc34cbaac2dce5b47d8d225ab53b2615eb23687b61018becd" }, "decision": "continue_search", "elapsed_s": 1.4991773329966236, "environment": { "platform": "Darwin-25.1.0-arm64-arm-64bit-Mach-O", "python": "3.13.14", "runner_sha256": "e053ed6e48bb3fd4e2e43b05952c8e7a3d81493cd72ce240e56162c562ef67e1", "traveler_metrics_sha256": "82f01ea76afa99cd8eae4f351238fc86239e0d7a85a3b5287b0db9e69966cc4b", "tsv_process_sha256": "358bb45cd9e48f4e5e78f6123a763b0922fc42fe1c9c365b1981a83d3d293a80", "viennals_binary_sha256": "a92d0fabb3d1cf0e58edb5eb2e55576193a53c2c189b0db5217786d3a6f7fb2a", "viennaps_binary_sha256": "0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": null, "event_hash": "29140a1b885c13e1a56daad5659a7f6abdc60015868b2f3d0b41b3b1262b0c65", "failure_scope": null, "hard_gate_pass": true, "inputs": { "coded_levels": [ -1, 1, 1, -1, -1, -1, 1, -1, 0, 1, -1, 1 ], "derived_exposures": { "total_cycle_etch_duration": 3.2, "total_etch_duration_including_open": 3.3000000000000003, "total_polymer_deposition_amount": 0.048, "total_polymer_directional_removal_amount": -0.048 }, "design_row": 8, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.01, "deposition_thickness": 0.003, "etch_time": 0.2, "initial_etch_time": 0.1, "ion_rate": -0.04, "ion_source_exponent": 1000.0, "mask_taper": 6.0, "neutral_rate": -0.2, "neutral_sticking_probability": 0.3, "num_cycles": 16, "radius": 0.12, "theta_r_min": 25.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": { "etch_bow": { "output_key": "max_bow", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.006256536315004627 }, "etch_cd_bottom": { "output_key": "cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the extracted depth.", "units": "model length", "value": 0.2254256193737631 }, "etch_cd_middle": { "output_key": "cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the extracted depth.", "units": "model length", "value": 0.23804213015966796 }, "etch_cd_top": { "output_key": "cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 10% of the extracted depth.", "units": "model length", "value": 0.2554987831943293 }, "etch_depth": { "output_key": "depth", "qualification_status": "pending", "region": "Silicon boundary from the declared surface to extracted floor.", "units": "model length", "value": 0.4995073683941518 }, "etch_maximum_cd_error": { "output_key": "max_cd_error", "qualification_status": "pending", "region": "76 horizontal samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.07457438062623689 }, "etch_minimum_cd": { "output_key": "cd_min", "qualification_status": "pending", "region": "76 horizontal samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.2254256193737631 }, "etch_scallop_rms": { "output_key": "scallop_rms", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.001466538361626874 }, "etch_sidewall_angle": { "output_key": "sidewall_angle_deg", "qualification_status": "pending", "region": "Widths at 10% and 85% of the extracted depth.", "units": "degrees", "value": 2.298452552033375 }, "mask_height": { "output_key": "mask_height", "qualification_status": "pending", "region": "Complete extracted mask boundary.", "units": "model length", "value": 0.2999 }, "mask_opening_cd_bottom": { "output_key": "opening_cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 5% of the measured mask height.", "units": "model length", "value": 0.2431941177097239 }, "mask_opening_cd_middle": { "output_key": "opening_cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the measured mask height.", "units": "model length", "value": 0.27156280185028264 }, "mask_opening_cd_top": { "output_key": "opening_cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the measured mask height.", "units": "model length", "value": 0.2936273339596061 }, "mask_sidewall_angle": { "output_key": "mask_sidewall_angle_deg", "qualification_status": "pending", "region": "Opening widths at 5% and 85% of the measured mask height.", "units": "degrees", "value": 6.000000000000001 }, "post_etch_mask_remaining_height": { "qualification_status": "observation_only", "units": "model length", "value": 0.2949028591434908 } }, "metrics_valid": true, "next_action": "Retain the raw observation and finish the bounded pilot.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "screening_only", "previous_event_hash": "d7a07a92aeff1321ee26ff4349bffa0eab6da70f00dafd2cfa73ed03162ff0dd", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "complete_measured", "stop_reason": null, "timestamp": "2026-07-18T07:50:56.693068Z", "unresolved_reasons": [ "single shared seed label; no repeat uncertainty", "0.01 grid and 250 rays are not numerically qualified" ] }, { "attempt": 1, "case_key": "a0b1a42f034be0b4", "case_payload_hash": "22471ca4017d350d714d8b8d5c836b50c644ed58887271a0fb322bfdb4a710d3", "checkpoint": { "final_completed_cycle": 16, "path": "autoresearch-results/range_pilot/pattern_bosch_dsd25_rows_checkpoints/a0b1a42f034be0b4_cycle016.npz", "sha256": "528e3f6ecc30d249db767f58181e42bddc9af955b5a5db571dab4fd124285d51" }, "decision": "continue_search", "elapsed_s": 154.15753929197672, "environment": { "platform": "Darwin-25.1.0-arm64-arm-64bit-Mach-O", "python": "3.13.14", "runner_sha256": "e053ed6e48bb3fd4e2e43b05952c8e7a3d81493cd72ce240e56162c562ef67e1", "traveler_metrics_sha256": "82f01ea76afa99cd8eae4f351238fc86239e0d7a85a3b5287b0db9e69966cc4b", "tsv_process_sha256": "358bb45cd9e48f4e5e78f6123a763b0922fc42fe1c9c365b1981a83d3d293a80", "viennals_binary_sha256": "a92d0fabb3d1cf0e58edb5eb2e55576193a53c2c189b0db5217786d3a6f7fb2a", "viennaps_binary_sha256": "0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": null, "event_hash": "c21904ae5c75384caa14e0e8d7d245469b0d3cc39a8ac405becb6e6929fbb381", "failure_scope": null, "hard_gate_pass": true, "inputs": { "coded_levels": [ -1, 1, 1, 1, -1, -1, -1, 1, -1, 0, 1, -1 ], "derived_exposures": { "total_cycle_etch_duration": 32.0, "total_etch_duration_including_open": 32.1, "total_polymer_deposition_amount": 0.64, "total_polymer_directional_removal_amount": -0.64 }, "design_row": 9, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.001, "deposition_thickness": 0.04, "etch_time": 2.0, "initial_etch_time": 0.1, "ion_rate": -0.22, "ion_source_exponent": 400.0, "mask_taper": 6.0, "neutral_rate": -0.2, "neutral_sticking_probability": 0.02, "num_cycles": 16, "radius": 0.12, "theta_r_min": 90.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": { "etch_bow": { "output_key": "max_bow", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.08583914385490549 }, "etch_cd_bottom": { "output_key": "cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the extracted depth.", "units": "model length", "value": 0.505038373271409 }, "etch_cd_middle": { "output_key": "cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the extracted depth.", "units": "model length", "value": 0.4934506466294136 }, "etch_cd_top": { "output_key": "cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 10% of the extracted depth.", "units": "model length", "value": 0.40551465505410234 }, "etch_depth": { "output_key": "depth", "qualification_status": "pending", "region": "Silicon boundary from the declared surface to extracted floor.", "units": "model length", "value": 5.844981533839614 }, "etch_maximum_cd_error": { "output_key": "max_cd_error", "qualification_status": "pending", "region": "76 horizontal samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.2825008744021697 }, "etch_minimum_cd": { "output_key": "cd_min", "qualification_status": "pending", "region": "76 horizontal samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.35602122658673296 }, "etch_scallop_rms": { "output_key": "scallop_rms", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.019774980477546188 }, "etch_sidewall_angle": { "output_key": "sidewall_angle_deg", "qualification_status": "pending", "region": "Widths at 10% and 85% of the extracted depth.", "units": "degrees", "value": -0.6503635157390584 }, "mask_height": { "output_key": "mask_height", "qualification_status": "pending", "region": "Complete extracted mask boundary.", "units": "model length", "value": 0.2999 }, "mask_opening_cd_bottom": { "output_key": "opening_cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 5% of the measured mask height.", "units": "model length", "value": 0.2431941177097239 }, "mask_opening_cd_middle": { "output_key": "opening_cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the measured mask height.", "units": "model length", "value": 0.27156280185028264 }, "mask_opening_cd_top": { "output_key": "opening_cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the measured mask height.", "units": "model length", "value": 0.2936273339596061 }, "mask_sidewall_angle": { "output_key": "mask_sidewall_angle_deg", "qualification_status": "pending", "region": "Opening widths at 5% and 85% of the measured mask height.", "units": "degrees", "value": 6.000000000000001 }, "post_etch_mask_remaining_height": { "qualification_status": "observation_only", "units": "model length", "value": 0.29390170852562625 } }, "metrics_valid": true, "next_action": "Retain the raw observation and finish the bounded pilot.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "screening_only", "previous_event_hash": "29140a1b885c13e1a56daad5659a7f6abdc60015868b2f3d0b41b3b1262b0c65", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "complete_measured", "stop_reason": null, "timestamp": "2026-07-18T07:50:58.195790Z", "unresolved_reasons": [ "single shared seed label; no repeat uncertainty", "0.01 grid and 250 rays are not numerically qualified" ] }, { "attempt": 1, "case_key": "270ed2834457ec9c", "case_payload_hash": "9a301bc7f3ac1a748057096824d553ab1a6a226f00ef1f14c386719355fdfc46", "checkpoint": null, "decision": "reproduce_minimal", "elapsed_s": 12.370199875003891, "environment": { "platform": "Darwin-25.1.0-arm64-arm-64bit-Mach-O", "python": "3.13.14", "runner_sha256": "e053ed6e48bb3fd4e2e43b05952c8e7a3d81493cd72ce240e56162c562ef67e1", "traveler_metrics_sha256": "82f01ea76afa99cd8eae4f351238fc86239e0d7a85a3b5287b0db9e69966cc4b", "tsv_process_sha256": "358bb45cd9e48f4e5e78f6123a763b0922fc42fe1c9c365b1981a83d3d293a80", "viennals_binary_sha256": "a92d0fabb3d1cf0e58edb5eb2e55576193a53c2c189b0db5217786d3a6f7fb2a", "viennaps_binary_sha256": "0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": { "message": "no via-wall intersection at y=-0.11443352906498216", "type": "ValueError" }, "event_hash": "f1ef05bea89465626092d0fd224da056653a87e72dd1c77b6eec7a6743caab16", "failure_scope": "geometry", "hard_gate_pass": null, "inputs": { "coded_levels": [ -1, -1, 1, 1, 1, -1, -1, -1, 1, -1, 0, 1 ], "derived_exposures": { "total_cycle_etch_duration": 32.0, "total_etch_duration_including_open": 32.5, "total_polymer_deposition_amount": 0.048, "total_polymer_directional_removal_amount": -0.048 }, "design_row": 10, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.03, "deposition_thickness": 0.003, "etch_time": 2.0, "initial_etch_time": 0.5, "ion_rate": -0.04, "ion_source_exponent": 50.0, "mask_taper": -4.0, "neutral_rate": -0.2, "neutral_sticking_probability": 0.02, "num_cycles": 16, "radius": 0.12, "theta_r_min": 45.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": null, "metrics_valid": null, "next_action": "Preserve the row and inspect the smallest reproducer.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "failed", "previous_event_hash": "c21904ae5c75384caa14e0e8d7d245469b0d3cc39a8ac405becb6e6929fbb381", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "failed_deterministic", "stop_reason": null, "timestamp": "2026-07-18T07:53:32.360819Z", "unresolved_reasons": [ "deterministic execution or geometry failure", "Traceback (most recent call last):\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 246, in run_case\n tp.bosch_etch(\n ~~~~~~~~~~~~~^\n geometry,\n ^^^^^^^^^\n ...<16 lines>...\n on_cycle=capture_final,\n ^^^^^^^^^^^^^^^^^^^^^^^\n )\n ^\n File \"/Users/koohaoming/ViennaPS-HBM/tsv_process.py\", line 370, in bosch_etch\n on_cycle(geometry, i + 1)\n ~~~~~~~~^^^^^^^^^^^^^^^^^\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 232, in capture_final\n final_metrics = gate0.measure_selected_cycle(\n silicon, mask, measurement_case\n )\n File \"/Users/koohaoming/ViennaPS-HBM/foundation_pattern_bosch_gate0.py\", line 457, in measure_selected_cycle\n etch = tm.etch_profile_metrics_2d(\n silicon_mesh[\"nodes\"],\n ...<4 lines>...\n max_radius=case[\"target\"][\"opening_cd\"],\n )\n File \"/Users/koohaoming/ViennaPS-HBM/traveler_metrics.py\", line 406, in etch_profile_metrics_2d\n quarter_via_radius_at_y(nodes, lines, y, max_radius=max_radius)\n ~~~~~~~~~~~~~~~~~~~~~~~^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^\n File \"/Users/koohaoming/ViennaPS-HBM/traveler_metrics.py\", line 273, in quarter_via_radius_at_y\n raise ValueError(f\"no via-wall intersection at y={y}\")\nValueError: no via-wall intersection at y=-0.11443352906498216\n" ] }, { "attempt": 1, "case_key": "b32ac6c9b7d10b8a", "case_payload_hash": "ada471f1a4400893005b0ec40b8b92b8495a66358ab334d0ce93d7bc334ab751", "checkpoint": { "final_completed_cycle": 4, "path": "autoresearch-results/range_pilot/pattern_bosch_dsd25_rows_checkpoints/b32ac6c9b7d10b8a_cycle004.npz", "sha256": "8c15ee155e2621fd39b6ad8bf8183ed46ec991b6b477a8eda84e44b90037589f" }, "decision": "continue_search", "elapsed_s": 9.55298062498332, "environment": { "platform": "Darwin-25.1.0-arm64-arm-64bit-Mach-O", "python": "3.13.14", "runner_sha256": "e053ed6e48bb3fd4e2e43b05952c8e7a3d81493cd72ce240e56162c562ef67e1", "traveler_metrics_sha256": "82f01ea76afa99cd8eae4f351238fc86239e0d7a85a3b5287b0db9e69966cc4b", "tsv_process_sha256": "358bb45cd9e48f4e5e78f6123a763b0922fc42fe1c9c365b1981a83d3d293a80", "viennals_binary_sha256": "a92d0fabb3d1cf0e58edb5eb2e55576193a53c2c189b0db5217786d3a6f7fb2a", "viennaps_binary_sha256": "0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": null, "event_hash": "ddd040b7fa26ad9b5e5fdc13a794cf0b4eef301e35200bc5c26c23442c441be8", "failure_scope": null, "hard_gate_pass": true, "inputs": { "coded_levels": [ -1, 1, -1, 1, 1, 1, -1, -1, -1, 1, -1, 0 ], "derived_exposures": { "total_cycle_etch_duration": 8.0, "total_etch_duration_including_open": 8.5, "total_polymer_deposition_amount": 0.012, "total_polymer_directional_removal_amount": -0.012 }, "design_row": 11, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.001, "deposition_thickness": 0.003, "etch_time": 2.0, "initial_etch_time": 0.5, "ion_rate": -0.1, "ion_source_exponent": 1000.0, "mask_taper": 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"interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.001, "deposition_thickness": 0.003, "etch_time": 0.2, "initial_etch_time": 0.1, "ion_rate": -0.22, "ion_source_exponent": 50.0, "mask_taper": -4.0, "neutral_rate": -0.2, "neutral_sticking_probability": 0.02, "num_cycles": 4, "radius": 0.15, "theta_r_min": 25.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": { "etch_bow": { "output_key": "max_bow", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.051911027545162 }, "etch_cd_bottom": { "output_key": "cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the extracted depth.", "units": "model length", "value": 0.24986779709092213 }, "etch_cd_middle": { "output_key": "cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the extracted depth.", "units": "model length", "value": 0.39173223027390647 }, "etch_cd_top": { "output_key": "cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 10% of the extracted depth.", "units": "model length", "value": 0.3416466067321866 }, "etch_depth": { "output_key": "depth", "qualification_status": "pending", "region": "Silicon boundary from the declared surface to extracted floor.", "units": "model length", "value": 0.35135691221383397 }, "etch_maximum_cd_error": { "output_key": "max_cd_error", "qualification_status": "pending", "region": "76 horizontal samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.0918769518220045 }, "etch_minimum_cd": { "output_key": "cd_min", "qualification_status": "pending", "region": "76 horizontal samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.24986779709092213 }, "etch_scallop_rms": { "output_key": "scallop_rms", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.0027941176756828695 }, "etch_sidewall_angle": { "output_key": "sidewall_angle_deg", "qualification_status": "pending", "region": "Widths at 10% and 85% of the extracted depth.", "units": "degrees", "value": 9.87852021197975 }, "mask_height": { "output_key": "mask_height", "qualification_status": "pending", "region": "Complete extracted mask boundary.", "units": "model length", "value": 0.2999 }, "mask_opening_cd_bottom": { "output_key": "opening_cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 5% of the measured mask height.", "units": "model length", "value": 0.2978749241850367 }, "mask_opening_cd_middle": { "output_key": "opening_cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the measured mask height.", "units": "model length", "value": 0.27900097837336385 }, "mask_opening_cd_top": { "output_key": "opening_cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the measured mask height.", "units": "model length", "value": 0.2643212427420627 }, "mask_sidewall_angle": { "output_key": "mask_sidewall_angle_deg", "qualification_status": "pending", "region": "Opening widths at 5% and 85% of the measured mask height.", "units": "degrees", "value": -3.9999999999999947 }, "post_etch_mask_remaining_height": { "qualification_status": "observation_only", "units": "model length", "value": 0.2995829722424293 } }, "metrics_valid": true, "next_action": "Retain the raw observation and finish the bounded pilot.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "screening_only", "previous_event_hash": "ddd040b7fa26ad9b5e5fdc13a794cf0b4eef301e35200bc5c26c23442c441be8", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "complete_measured", "stop_reason": null, "timestamp": "2026-07-18T07:53:54.296929Z", "unresolved_reasons": [ "single shared seed label; no repeat uncertainty", "0.01 grid and 250 rays are not numerically qualified" ] }, { "attempt": 1, "case_key": "fed102f8549822b8", "case_payload_hash": "118f3472243abfd02aeccb124a3728dc30ea731d901563a496512c48456165af", "checkpoint": null, "decision": "reproduce_minimal", "elapsed_s": 11.889222541998606, "environment": { "platform": "Darwin-25.1.0-arm64-arm-64bit-Mach-O", "python": "3.13.14", "runner_sha256": "e053ed6e48bb3fd4e2e43b05952c8e7a3d81493cd72ce240e56162c562ef67e1", "traveler_metrics_sha256": "82f01ea76afa99cd8eae4f351238fc86239e0d7a85a3b5287b0db9e69966cc4b", "tsv_process_sha256": "358bb45cd9e48f4e5e78f6123a763b0922fc42fe1c9c365b1981a83d3d293a80", "viennals_binary_sha256": "a92d0fabb3d1cf0e58edb5eb2e55576193a53c2c189b0db5217786d3a6f7fb2a", "viennaps_binary_sha256": "0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": { "message": "no via-wall intersection at y=-0.16042639619718446", "type": "ValueError" }, "event_hash": "e3f4c53a63013c5ef44e54bc986a8e60509c5b17d4425d1fd894d02bfbcf54fe", "failure_scope": "geometry", "hard_gate_pass": null, "inputs": { "coded_levels": [ 1, 0, -1, 1, -1, -1, -1, 1, 1, 1, -1, 1 ], "derived_exposures": { "total_cycle_etch_duration": 8.0, "total_etch_duration_including_open": 8.1, "total_polymer_deposition_amount": 0.16, "total_polymer_directional_removal_amount": -0.16 }, "design_row": 13, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.03, "deposition_thickness": 0.04, "etch_time": 2.0, "initial_etch_time": 0.1, "ion_rate": -0.04, "ion_source_exponent": 1000.0, "mask_taper": 2.0, "neutral_rate": -0.2, "neutral_sticking_probability": 0.02, "num_cycles": 4, "radius": 0.18, "theta_r_min": 25.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": null, "metrics_valid": null, "next_action": "Preserve the row and inspect the smallest reproducer.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "failed", "previous_event_hash": "1c4a86ffafdc0babea9898595268c80b61bc263848b8fa9abb1032a2bb242f1f", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "failed_deterministic", "stop_reason": null, "timestamp": "2026-07-18T07:53:55.215191Z", "unresolved_reasons": [ "deterministic execution or geometry failure", "Traceback (most recent call last):\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 246, in run_case\n tp.bosch_etch(\n ~~~~~~~~~~~~~^\n geometry,\n ^^^^^^^^^\n ...<16 lines>...\n on_cycle=capture_final,\n ^^^^^^^^^^^^^^^^^^^^^^^\n )\n ^\n File \"/Users/koohaoming/ViennaPS-HBM/tsv_process.py\", line 370, in bosch_etch\n on_cycle(geometry, i + 1)\n ~~~~~~~~^^^^^^^^^^^^^^^^^\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 232, in capture_final\n final_metrics = gate0.measure_selected_cycle(\n silicon, mask, measurement_case\n )\n File \"/Users/koohaoming/ViennaPS-HBM/foundation_pattern_bosch_gate0.py\", line 457, in measure_selected_cycle\n etch = tm.etch_profile_metrics_2d(\n silicon_mesh[\"nodes\"],\n ...<4 lines>...\n max_radius=case[\"target\"][\"opening_cd\"],\n )\n File \"/Users/koohaoming/ViennaPS-HBM/traveler_metrics.py\", line 406, in etch_profile_metrics_2d\n quarter_via_radius_at_y(nodes, lines, y, max_radius=max_radius)\n ~~~~~~~~~~~~~~~~~~~~~~~^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^\n File \"/Users/koohaoming/ViennaPS-HBM/traveler_metrics.py\", line 273, in quarter_via_radius_at_y\n raise ValueError(f\"no via-wall intersection at y={y}\")\nValueError: no via-wall intersection at y=-0.16042639619718446\n" ] }, { "attempt": 1, "case_key": "1876b721a052732e", "case_payload_hash": 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"ed44e380159b279cbfca3426a0adb2fcda5edf98ef7c91770e799d8740b16a44", "failure_scope": null, "hard_gate_pass": true, "inputs": { "coded_levels": [ 1, 1, 0, -1, 1, -1, -1, -1, 1, 1, 1, -1 ], "derived_exposures": { "total_cycle_etch_duration": 2.0, "total_etch_duration_including_open": 2.5, "total_polymer_deposition_amount": 0.03, "total_polymer_directional_removal_amount": -0.03 }, "design_row": 14, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.03, "deposition_thickness": 0.003, "etch_time": 0.2, "initial_etch_time": 0.5, "ion_rate": -0.22, "ion_source_exponent": 1000.0, "mask_taper": 6.0, "neutral_rate": -0.2, "neutral_sticking_probability": 0.02, "num_cycles": 10, "radius": 0.18, "theta_r_min": 90.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": { "etch_bow": { "output_key": "max_bow", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.03607474965348792 }, "etch_cd_bottom": { "output_key": "cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the extracted depth.", "units": "model length", "value": 0.42735827470524534 }, "etch_cd_middle": { "output_key": "cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the extracted 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"region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.005599843810340202 }, "etch_sidewall_angle": { "output_key": "sidewall_angle_deg", "qualification_status": "pending", "region": "Widths at 10% and 85% of the extracted depth.", "units": "degrees", "value": 1.0619774633658414 }, "mask_height": { "output_key": "mask_height", "qualification_status": "pending", "region": "Complete extracted mask boundary.", "units": "model length", "value": 0.2999 }, "mask_opening_cd_bottom": { "output_key": "opening_cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 5% of the measured mask height.", "units": "model length", "value": 0.3631941177097239 }, "mask_opening_cd_middle": { "output_key": "opening_cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the measured mask height.", "units": "model length", "value": 0.39156280185028264 }, "mask_opening_cd_top": { 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"interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.001, "deposition_thickness": 0.003, "etch_time": 0.5, "initial_etch_time": 0.1, "ion_rate": -0.04, "ion_source_exponent": 1000.0, "mask_taper": -4.0, "neutral_rate": -0.03, "neutral_sticking_probability": 0.02, "num_cycles": 16, "radius": 0.18, "theta_r_min": 90.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": { "etch_bow": { "output_key": "max_bow", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.006020179395847369 }, "etch_cd_bottom": { "output_key": "cd_bottom", 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length", "value": 0.3578749241850367 }, "mask_opening_cd_middle": { "output_key": "opening_cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the measured mask height.", "units": "model length", "value": 0.33900097837336385 }, "mask_opening_cd_top": { "output_key": "opening_cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the measured mask height.", "units": "model length", "value": 0.3243212427420627 }, "mask_sidewall_angle": { "output_key": "mask_sidewall_angle_deg", "qualification_status": "pending", "region": "Opening widths at 5% and 85% of the measured mask height.", "units": "degrees", "value": -3.9999999999999947 }, "post_etch_mask_remaining_height": { "qualification_status": "observation_only", "units": "model length", "value": 0.28929334485249436 } }, "metrics_valid": true, "next_action": "Retain the raw observation and finish the bounded pilot.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "screening_only", "previous_event_hash": "ed44e380159b279cbfca3426a0adb2fcda5edf98ef7c91770e799d8740b16a44", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "complete_measured", "stop_reason": null, "timestamp": "2026-07-18T07:54:10.959033Z", "unresolved_reasons": [ "single shared seed label; no repeat uncertainty", "0.01 grid and 250 rays are not numerically qualified" ] }, { "attempt": 1, "case_key": "b88f0c3e7a5e9bfb", "case_payload_hash": "4ceb661fbb3227a34b946472619201e09ee74d5ebd06db91e6d826f65fc51c2c", "checkpoint": null, "decision": "reproduce_minimal", "elapsed_s": 3.457576082990272, "environment": { "platform": "Darwin-25.1.0-arm64-arm-64bit-Mach-O", "python": "3.13.14", "runner_sha256": "e053ed6e48bb3fd4e2e43b05952c8e7a3d81493cd72ce240e56162c562ef67e1", "traveler_metrics_sha256": "82f01ea76afa99cd8eae4f351238fc86239e0d7a85a3b5287b0db9e69966cc4b", "tsv_process_sha256": "358bb45cd9e48f4e5e78f6123a763b0922fc42fe1c9c365b1981a83d3d293a80", "viennals_binary_sha256": "a92d0fabb3d1cf0e58edb5eb2e55576193a53c2c189b0db5217786d3a6f7fb2a", "viennaps_binary_sha256": "0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": { "message": "no via-wall intersection at y=-0.10072060174737606", "type": "ValueError" }, "event_hash": "6c87836f889f664ab21e9558c9299aa97dbb2788e765c8a04fd7c0c40b44312a", "failure_scope": "geometry", "hard_gate_pass": null, "inputs": { "coded_levels": [ 1, 1, -1, 1, 0, -1, 1, -1, -1, -1, 1, 1 ], "derived_exposures": { "total_cycle_etch_duration": 8.0, "total_etch_duration_including_open": 8.3, "total_polymer_deposition_amount": 0.012, "total_polymer_directional_removal_amount": -0.012 }, "design_row": 16, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.001, "deposition_thickness": 0.003, "etch_time": 2.0, "initial_etch_time": 0.3, "ion_rate": -0.04, "ion_source_exponent": 50.0, "mask_taper": 6.0, "neutral_rate": -0.2, "neutral_sticking_probability": 0.3, "num_cycles": 4, "radius": 0.18, "theta_r_min": 90.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": null, "metrics_valid": null, "next_action": "Preserve the row and inspect the smallest reproducer.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "failed", "previous_event_hash": "caf46371bf31f051b38c6b4093b3388bda04dbe054b3839ca97dc6791696cccb", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "failed_deterministic", "stop_reason": null, "timestamp": "2026-07-18T07:54:12.758543Z", "unresolved_reasons": [ "deterministic execution or geometry failure", "Traceback (most recent call last):\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 246, in run_case\n tp.bosch_etch(\n ~~~~~~~~~~~~~^\n geometry,\n ^^^^^^^^^\n ...<16 lines>...\n on_cycle=capture_final,\n ^^^^^^^^^^^^^^^^^^^^^^^\n )\n ^\n File \"/Users/koohaoming/ViennaPS-HBM/tsv_process.py\", line 370, in bosch_etch\n on_cycle(geometry, i + 1)\n ~~~~~~~~^^^^^^^^^^^^^^^^^\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 232, in capture_final\n final_metrics = gate0.measure_selected_cycle(\n silicon, mask, measurement_case\n )\n File \"/Users/koohaoming/ViennaPS-HBM/foundation_pattern_bosch_gate0.py\", line 457, in measure_selected_cycle\n etch = tm.etch_profile_metrics_2d(\n silicon_mesh[\"nodes\"],\n ...<4 lines>...\n max_radius=case[\"target\"][\"opening_cd\"],\n )\n File \"/Users/koohaoming/ViennaPS-HBM/traveler_metrics.py\", line 406, in etch_profile_metrics_2d\n quarter_via_radius_at_y(nodes, lines, y, max_radius=max_radius)\n ~~~~~~~~~~~~~~~~~~~~~~~^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^\n File \"/Users/koohaoming/ViennaPS-HBM/traveler_metrics.py\", line 273, in quarter_via_radius_at_y\n raise ValueError(f\"no via-wall intersection at y={y}\")\nValueError: no via-wall intersection at y=-0.10072060174737606\n" ] }, { "attempt": 1, "case_key": "c551f9396a8787d6", "case_payload_hash": 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"neutral_rate": -0.08, "neutral_sticking_probability": 0.02, "num_cycles": 16, "radius": 0.18, "theta_r_min": 25.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": { "etch_bow": { "output_key": "max_bow", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.018942748202136955 }, "etch_cd_bottom": { "output_key": "cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the extracted depth.", "units": "model length", "value": 0.07090717112543901 }, "etch_cd_middle": { "output_key": "cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the extracted depth.", "units": "model length", "value": 0.20824433115234034 }, "etch_cd_top": { "output_key": "cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 10% of the extracted depth.", "units": "model length", "value": 0.3984725974622173 }, "etch_depth": { "output_key": "depth", "qualification_status": "pending", "region": "Silicon boundary from the declared surface to extracted floor.", "units": "model length", "value": 0.18311607915221978 }, "etch_maximum_cd_error": { "output_key": "max_cd_error", "qualification_status": "pending", "region": "76 horizontal samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.22909282887456098 }, "etch_minimum_cd": { "output_key": "cd_min", "qualification_status": "pending", "region": "76 horizontal samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.07090717112543901 }, "etch_scallop_rms": { "output_key": "scallop_rms", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.006008988135268327 }, "etch_sidewall_angle": { "output_key": "sidewall_angle_deg", "qualification_status": "pending", "region": "Widths at 10% and 85% of the extracted depth.", "units": "degrees", "value": 50.01908780206386 }, "mask_height": { "output_key": "mask_height", "qualification_status": "pending", "region": "Complete extracted mask boundary.", "units": "model length", "value": 0.2999 }, "mask_opening_cd_bottom": { "output_key": "opening_cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 5% of the measured mask height.", "units": "model length", "value": 0.3631941177097239 }, "mask_opening_cd_middle": { "output_key": "opening_cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the measured mask height.", "units": "model length", "value": 0.39156280185028264 }, "mask_opening_cd_top": { "output_key": "opening_cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the measured mask height.", "units": "model length", "value": 0.41362733395960605 }, "mask_sidewall_angle": { "output_key": "mask_sidewall_angle_deg", "qualification_status": "pending", "region": "Opening widths at 5% and 85% of the measured mask height.", "units": "degrees", "value": 5.999999999999998 }, "post_etch_mask_remaining_height": { "qualification_status": "observation_only", "units": "model length", "value": 0.2908641012818837 } }, "metrics_valid": true, "next_action": "Retain the raw observation and finish the bounded pilot.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "screening_only", "previous_event_hash": "6c87836f889f664ab21e9558c9299aa97dbb2788e765c8a04fd7c0c40b44312a", "retry_count": 0, "retryable": false, "stage": 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"0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": { "message": "no via-wall intersection at y=-1.0358039321167636", "type": "ValueError" }, "event_hash": "c8838ec0e1eeeb8693e3e1f54c71e65db1944e4d6d36e57e8f6507fddf3fb223", "failure_scope": "geometry", "hard_gate_pass": null, "inputs": { "coded_levels": [ 1, 1, 1, 1, -1, 1, 0, -1, 1, -1, -1, -1 ], "derived_exposures": { "total_cycle_etch_duration": 32.0, "total_etch_duration_including_open": 32.1, "total_polymer_deposition_amount": 0.048, "total_polymer_directional_removal_amount": -0.048 }, "design_row": 18, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.03, "deposition_thickness": 0.003, "etch_time": 2.0, "initial_etch_time": 0.1, "ion_rate": -0.22, "ion_source_exponent": 50.0, "mask_taper": 6.0, "neutral_rate": -0.03, "neutral_sticking_probability": 0.08, "num_cycles": 16, "radius": 0.18, "theta_r_min": 25.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": null, "metrics_valid": null, "next_action": "Preserve the row and inspect the smallest reproducer.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "failed", "previous_event_hash": "542e3cd3d1bd615bb7cbb68b861c1a5b540920ff5fd33bdf124bcfc1dbe7b747", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "failed_deterministic", "stop_reason": null, "timestamp": "2026-07-18T07:54:18.663245Z", "unresolved_reasons": [ "deterministic execution or geometry failure", "Traceback (most recent call last):\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 246, in run_case\n tp.bosch_etch(\n ~~~~~~~~~~~~~^\n geometry,\n ^^^^^^^^^\n ...<16 lines>...\n on_cycle=capture_final,\n ^^^^^^^^^^^^^^^^^^^^^^^\n )\n ^\n File \"/Users/koohaoming/ViennaPS-HBM/tsv_process.py\", line 370, in bosch_etch\n on_cycle(geometry, i + 1)\n ~~~~~~~~^^^^^^^^^^^^^^^^^\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 232, in capture_final\n final_metrics = gate0.measure_selected_cycle(\n silicon, mask, measurement_case\n )\n File \"/Users/koohaoming/ViennaPS-HBM/foundation_pattern_bosch_gate0.py\", line 457, in measure_selected_cycle\n etch = tm.etch_profile_metrics_2d(\n silicon_mesh[\"nodes\"],\n ...<4 lines>...\n max_radius=case[\"target\"][\"opening_cd\"],\n )\n File \"/Users/koohaoming/ViennaPS-HBM/traveler_metrics.py\", line 406, in etch_profile_metrics_2d\n quarter_via_radius_at_y(nodes, lines, y, max_radius=max_radius)\n ~~~~~~~~~~~~~~~~~~~~~~~^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^\n File \"/Users/koohaoming/ViennaPS-HBM/traveler_metrics.py\", line 273, in quarter_via_radius_at_y\n raise ValueError(f\"no via-wall intersection at y={y}\")\nValueError: no via-wall intersection at y=-1.0358039321167636\n" ] }, { "attempt": 1, "case_key": "031eff54b2d11a1a", "case_payload_hash": "52eefdf34e094d9f5afdd166cb28d28800d12d3791feefba99a184bc0c4e5d36", "checkpoint": null, "decision": "reproduce_minimal", "elapsed_s": 177.6887372499914, "environment": { "platform": "Darwin-25.1.0-arm64-arm-64bit-Mach-O", "python": "3.13.14", "runner_sha256": "e053ed6e48bb3fd4e2e43b05952c8e7a3d81493cd72ce240e56162c562ef67e1", "traveler_metrics_sha256": "82f01ea76afa99cd8eae4f351238fc86239e0d7a85a3b5287b0db9e69966cc4b", "tsv_process_sha256": "358bb45cd9e48f4e5e78f6123a763b0922fc42fe1c9c365b1981a83d3d293a80", "viennals_binary_sha256": "a92d0fabb3d1cf0e58edb5eb2e55576193a53c2c189b0db5217786d3a6f7fb2a", "viennaps_binary_sha256": "0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": { "message": "no via-wall intersection at y=-0.9969752870852923", "type": "ValueError" }, "event_hash": "f182fe47426044c66a58f6766d5fce705f0e888506eee34fa128c7627665d9a7", "failure_scope": "geometry", "hard_gate_pass": null, "inputs": { "coded_levels": [ 1, -1, 1, 1, 1, -1, 1, 0, -1, 1, -1, -1 ], "derived_exposures": { "total_cycle_etch_duration": 32.0, "total_etch_duration_including_open": 32.5, "total_polymer_deposition_amount": 0.08, "total_polymer_directional_removal_amount": -0.08 }, "design_row": 19, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.001, "deposition_thickness": 0.005, "etch_time": 2.0, "initial_etch_time": 0.5, "ion_rate": -0.22, "ion_source_exponent": 1000.0, "mask_taper": -4.0, "neutral_rate": -0.2, "neutral_sticking_probability": 0.3, "num_cycles": 16, "radius": 0.18, "theta_r_min": 25.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": null, "metrics_valid": null, "next_action": "Preserve the row and inspect the smallest reproducer.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "failed", "previous_event_hash": "c8838ec0e1eeeb8693e3e1f54c71e65db1944e4d6d36e57e8f6507fddf3fb223", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "failed_deterministic", "stop_reason": null, "timestamp": "2026-07-18T07:56:49.674345Z", "unresolved_reasons": [ "deterministic execution or geometry failure", "Traceback (most recent call last):\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 246, in run_case\n tp.bosch_etch(\n ~~~~~~~~~~~~~^\n geometry,\n ^^^^^^^^^\n ...<16 lines>...\n on_cycle=capture_final,\n ^^^^^^^^^^^^^^^^^^^^^^^\n )\n ^\n File \"/Users/koohaoming/ViennaPS-HBM/tsv_process.py\", line 370, in bosch_etch\n on_cycle(geometry, i + 1)\n ~~~~~~~~^^^^^^^^^^^^^^^^^\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 232, in capture_final\n final_metrics = gate0.measure_selected_cycle(\n silicon, mask, measurement_case\n )\n File \"/Users/koohaoming/ViennaPS-HBM/foundation_pattern_bosch_gate0.py\", line 457, in measure_selected_cycle\n etch = tm.etch_profile_metrics_2d(\n silicon_mesh[\"nodes\"],\n ...<4 lines>...\n max_radius=case[\"target\"][\"opening_cd\"],\n )\n File \"/Users/koohaoming/ViennaPS-HBM/traveler_metrics.py\", line 406, in etch_profile_metrics_2d\n quarter_via_radius_at_y(nodes, lines, y, max_radius=max_radius)\n ~~~~~~~~~~~~~~~~~~~~~~~^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^\n File \"/Users/koohaoming/ViennaPS-HBM/traveler_metrics.py\", line 273, in quarter_via_radius_at_y\n raise ValueError(f\"no via-wall intersection at y={y}\")\nValueError: no via-wall intersection at y=-0.9969752870852923\n" ] }, { "attempt": 1, "case_key": "1cb56644ad10ff06", "case_payload_hash": "4659e10afa94500de33adf53a71efba52122e843189b21230dc8a40e52448568", "checkpoint": { "final_completed_cycle": 4, "path": "autoresearch-results/range_pilot/pattern_bosch_dsd25_rows_checkpoints/1cb56644ad10ff06_cycle004.npz", "sha256": "5641af1c330f075be24f3085906fba7d34ae72df2d8d93a65126c9cc032d840b" }, "decision": "continue_search", "elapsed_s": 7.437461166991852, "environment": { "platform": "Darwin-25.1.0-arm64-arm-64bit-Mach-O", "python": "3.13.14", "runner_sha256": "e053ed6e48bb3fd4e2e43b05952c8e7a3d81493cd72ce240e56162c562ef67e1", "traveler_metrics_sha256": "82f01ea76afa99cd8eae4f351238fc86239e0d7a85a3b5287b0db9e69966cc4b", "tsv_process_sha256": "358bb45cd9e48f4e5e78f6123a763b0922fc42fe1c9c365b1981a83d3d293a80", "viennals_binary_sha256": "a92d0fabb3d1cf0e58edb5eb2e55576193a53c2c189b0db5217786d3a6f7fb2a", "viennaps_binary_sha256": "0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": null, "event_hash": "e2277f225fe10e8917c18936204da9574795294e59afa1f30d67db5966753b93", "failure_scope": null, "hard_gate_pass": true, "inputs": { "coded_levels": [ 1, -1, -1, 1, 1, 1, -1, 1, 0, -1, 1, -1 ], "derived_exposures": { "total_cycle_etch_duration": 8.0, "total_etch_duration_including_open": 8.5, "total_polymer_deposition_amount": 0.16, "total_polymer_directional_removal_amount": -0.16 }, "design_row": 20, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.01, "deposition_thickness": 0.04, "etch_time": 2.0, "initial_etch_time": 0.5, "ion_rate": -0.22, "ion_source_exponent": 50.0, "mask_taper": -4.0, "neutral_rate": -0.03, "neutral_sticking_probability": 0.02, "num_cycles": 4, "radius": 0.18, "theta_r_min": 90.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": { "etch_bow": { "output_key": "max_bow", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.014694658673019306 }, "etch_cd_bottom": { "output_key": "cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the extracted depth.", "units": "model length", "value": 0.3621494239938735 }, "etch_cd_middle": { "output_key": "cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the extracted depth.", "units": "model length", "value": 0.3889297961089276 }, "etch_cd_top": { "output_key": "cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 10% of the extracted depth.", "units": "model length", "value": 0.38444465243787956 }, "etch_depth": { "output_key": "depth", "qualification_status": "pending", "region": "Silicon boundary from the declared surface to extracted floor.", "units": "model length", "value": 1.4489794162401364 }, "etch_maximum_cd_error": { "output_key": "max_cd_error", "qualification_status": "pending", "region": "76 horizontal samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.09974921370761664 }, "etch_minimum_cd": { "output_key": "cd_min", "qualification_status": "pending", "region": "76 horizontal samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.35795559506888575 }, "etch_scallop_rms": { "output_key": "scallop_rms", "qualification_status": "pending", "region": "76 wall-radius samples from 10% to 85% of the extracted depth.", "units": "model length", "value": 0.004193225366954314 }, "etch_sidewall_angle": { "output_key": "sidewall_angle_deg", "qualification_status": "pending", "region": "Widths at 10% and 85% of the extracted depth.", "units": "degrees", "value": 0.5877137504503455 }, "mask_height": { "output_key": "mask_height", "qualification_status": "pending", "region": "Complete extracted mask boundary.", "units": "model length", "value": 0.2999 }, "mask_opening_cd_bottom": { "output_key": "opening_cd_bottom", "qualification_status": "pending", "region": "Horizontal intersection at 5% of the measured mask height.", "units": "model length", "value": 0.3578749241850367 }, "mask_opening_cd_middle": { "output_key": "opening_cd_middle", "qualification_status": "pending", "region": "Horizontal intersection at 50% of the measured mask height.", "units": "model length", "value": 0.33900097837336385 }, "mask_opening_cd_top": { "output_key": "opening_cd_top", "qualification_status": "pending", "region": "Horizontal intersection at 85% of the measured mask height.", "units": "model length", "value": 0.3243212427420627 }, "mask_sidewall_angle": { "output_key": "mask_sidewall_angle_deg", "qualification_status": "pending", "region": "Opening widths at 5% and 85% of the measured mask height.", "units": "degrees", "value": -3.9999999999999947 }, "post_etch_mask_remaining_height": { "qualification_status": "observation_only", "units": "model length", "value": 0.2987196294337748 } }, "metrics_valid": true, "next_action": "Retain the raw observation and finish the bounded pilot.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "screening_only", "previous_event_hash": "f182fe47426044c66a58f6766d5fce705f0e888506eee34fa128c7627665d9a7", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "complete_measured", "stop_reason": null, "timestamp": "2026-07-18T07:59:47.376674Z", "unresolved_reasons": [ "single shared seed label; no repeat uncertainty", "0.01 grid and 250 rays are not numerically qualified" ] }, { "attempt": 1, "case_key": "4405fc56d8e10409", "case_payload_hash": "861ecbb3a2c5bacbe70e6c90bf9eb830495730a525aa20228a814581d0f1dd81", "checkpoint": null, "decision": "reproduce_minimal", "elapsed_s": 0.22080333300982602, "environment": { "platform": "Darwin-25.1.0-arm64-arm-64bit-Mach-O", "python": "3.13.14", "runner_sha256": "e053ed6e48bb3fd4e2e43b05952c8e7a3d81493cd72ce240e56162c562ef67e1", "traveler_metrics_sha256": "82f01ea76afa99cd8eae4f351238fc86239e0d7a85a3b5287b0db9e69966cc4b", "tsv_process_sha256": "358bb45cd9e48f4e5e78f6123a763b0922fc42fe1c9c365b1981a83d3d293a80", "viennals_binary_sha256": "a92d0fabb3d1cf0e58edb5eb2e55576193a53c2c189b0db5217786d3a6f7fb2a", "viennaps_binary_sha256": "0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": { "message": "etch barely moved: depth=-0.08048442203570533", "type": "RuntimeError" }, "event_hash": "b89204907eb8d6c75c82b1c7d65bd5c4809bcb9d7dbbf959a7501e28dfe01ae6", "failure_scope": "geometry", "hard_gate_pass": null, "inputs": { "coded_levels": [ 1, -1, -1, -1, 1, 1, 1, -1, 1, 0, -1, 1 ], "derived_exposures": { "total_cycle_etch_duration": 0.8, "total_etch_duration_including_open": 1.3, "total_polymer_deposition_amount": 0.012, "total_polymer_directional_removal_amount": -0.012 }, "design_row": 21, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.03, "deposition_thickness": 0.003, "etch_time": 0.2, "initial_etch_time": 0.5, "ion_rate": -0.04, "ion_source_exponent": 400.0, "mask_taper": -4.0, "neutral_rate": -0.03, "neutral_sticking_probability": 0.3, "num_cycles": 4, "radius": 0.18, "theta_r_min": 25.0 }, "rng_policy": { "independent_repeats_present": false, "pointwise_common_random_numbers_not_claimed": true, "shared_base_seed_label_across_rows": true } }, "manifest_hash": "f4c6fd29bf6de22ce4c706ca19bd6c8274e03b254c8bcedb60ba86e6c3e15b52", "manifest_id": "pattern-bosch-range-pilot-v1", "manifest_version": 1, "measurements": null, "metrics_valid": null, "next_action": "Preserve the row and inspect the smallest reproducer.", "numerical_profile": { "grid_delta": 0.01, "rays_per_point": 250, "status": "coarse_pilot_not_numerically_qualified", "threads_per_worker": 4 }, "numerical_state": "failed", "previous_event_hash": "e2277f225fe10e8917c18936204da9574795294e59afa1f30d67db5966753b93", "retry_count": 0, "retryable": false, "stage": "mask_and_bosch_range_pilot", "state": "failed_deterministic", "stop_reason": null, "timestamp": "2026-07-18T07:59:54.821903Z", "unresolved_reasons": [ "deterministic execution or geometry failure", "Traceback (most recent call last):\n File \"/Users/koohaoming/ViennaPS-HBM/run_pattern_bosch_range_pilot.py\", line 246, in run_case\n tp.bosch_etch(\n ~~~~~~~~~~~~~^\n geometry,\n ^^^^^^^^^\n ...<16 lines>...\n on_cycle=capture_final,\n ^^^^^^^^^^^^^^^^^^^^^^^\n )\n ^\n File \"/Users/koohaoming/ViennaPS-HBM/tsv_process.py\", line 374, in bosch_etch\n raise RuntimeError(f\"etch barely moved: depth={depth}\")\nRuntimeError: etch barely moved: depth=-0.08048442203570533\n" ] }, { "attempt": 1, "case_key": "c3624c457e442ee7", "case_payload_hash": "5dc251346b33e073e8e3420c0d7e16cfe3576da228736a1adc105c1d0a008b9f", "checkpoint": { "final_completed_cycle": 4, "path": "autoresearch-results/range_pilot/pattern_bosch_dsd25_rows_checkpoints/c3624c457e442ee7_cycle004.npz", "sha256": "0de78c377edc4c423f6982b45ba18e1f3fd43af38a9718eecd33192b687bbcdf" }, "decision": "continue_search", "elapsed_s": 1.0114309999917168, "environment": { "platform": "Darwin-25.1.0-arm64-arm-64bit-Mach-O", "python": "3.13.14", "runner_sha256": "e053ed6e48bb3fd4e2e43b05952c8e7a3d81493cd72ce240e56162c562ef67e1", "traveler_metrics_sha256": "82f01ea76afa99cd8eae4f351238fc86239e0d7a85a3b5287b0db9e69966cc4b", "tsv_process_sha256": "358bb45cd9e48f4e5e78f6123a763b0922fc42fe1c9c365b1981a83d3d293a80", "viennals_binary_sha256": "a92d0fabb3d1cf0e58edb5eb2e55576193a53c2c189b0db5217786d3a6f7fb2a", "viennaps_binary_sha256": "0fb3e28628a60ae1206fde1f584fa55d1590e380569a5d7984fc8b6a34334480" }, "error": null, "event_hash": "12c2d3e487bba7482414632d7364ffaa63b8ddac5cead93d09568d1e4a797375", "failure_scope": null, "hard_gate_pass": true, "inputs": { "coded_levels": [ 1, 1, -1, -1, -1, 1, 1, 1, -1, 1, 0, -1 ], "derived_exposures": { "total_cycle_etch_duration": 0.8, "total_etch_duration_including_open": 0.9, "total_polymer_deposition_amount": 0.16, "total_polymer_directional_removal_amount": -0.16 }, "design_row": 22, "inference_policy": { "allowed": [ "execution and completion state", "raw measured values", "observed minimum, maximum, and span at the named coarse setting", "runtime and invalidity classes", "rows nominated for confirmation" ], "prohibited": [ "factor effect or ranking", "uncertainty or curvature", "interaction", "failure-boundary location", "process qualification, optimum, or process window" ] }, "recipe": { "deposition_sticking_probability": 0.001, "deposition_thickness": 0.04, "etch_time": 0.2, "initial_etch_time": 0.1, "ion_rate": -0.22, "ion_source_exponent": 1000.0, "mask_taper": 6.0, "neutral_rate": -0.03, "neutral_sticking_probability": 0.3, "num_cycles": 4, "radius": 0.18, "theta_r_min": 45.0 }, "rng_policy": { "independent_repeats_present": false, 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